{"id":599362,"date":"2024-11-05T22:00:49","date_gmt":"2024-11-05T22:00:49","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/iso-175602002\/"},"modified":"2024-11-05T22:00:49","modified_gmt":"2024-11-05T22:00:49","slug":"iso-175602002","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/iso\/iso-175602002\/","title":{"rendered":"ISO 17560:2002"},"content":{"rendered":"<p>ISO 17560:2002 specifies a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon, and using stylus profilometry or optical interferometry for depth scale calibration. This method is applicable to single-crystal, poly-crystal or amorphous-silicon specimens with boron atomic concentrations between 1\u00d710<sup>16<\/sup> atoms\/cm<sup>3<\/sup> and 1\u00d710<sup>20<\/sup> atoms\/cm<sup>3<\/sup>, and to crater depths of 50 nm or deeper.<\/p>\n","protected":false},"excerpt":{"rendered":"<p><b>Surface chemical analysis \u2014 Secondary-ion mass spectrometry \u2014 Method for depth profiling of boron in silicon<\/b><\/p>\n<table style=\"width: 100%\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td>Published By<\/td>\n<td>Publication Date<\/td>\n<td>Number of Pages<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/pdfstandards.shop\/product-category\/publishers\/iso\/\"><b>ISO<\/b><\/a><\/td>\n<td>2002-07<\/td>\n<td>18<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":599371,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[1000,2634],"product_tag":[],"class_list":{"0":"post-599362","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-71-040-40","7":"product_cat-iso","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/599362","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/599371"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=599362"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=599362"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=599362"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}