This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in ISO 25178-600. Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments. Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in ISO 25178-701. This document does not include procedures for area-integrating methods, although those are also stated in ISO 25178-6. For example, light scattering belongs to a class of techniques known as area-integrating methods for measuring surface topography.<\/p>\n
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| 2<\/td>\n | undefined <\/td>\n<\/tr>\n | ||||||
| 4<\/td>\n | European foreword Endorsement notice <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
| 8<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
| 9<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 10<\/td>\n | 4 Symbols and abbreviated terms <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | 5 Calibration, adjustment and verification of an instrument 5.1 General 5.2 Methods for calibration, adjustment and verification <\/td>\n<\/tr>\n | ||||||
| 12<\/td>\n | 5.3 Instrument calibration procedure 5.3.1 Calibration by measurement standards 5.3.2 Handling of defects on material measures 5.3.3 Measurement procedures for calibration with measurement standards 5.3.4 Calibration conditions <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 6 Determination of the metrological characteristics of the instrument 6.1 General 6.2 Reporting of the measurement conditions 6.3 Handling of non-measured points 6.4 Handling of spurious data and outliers 6.5 Metrological characteristic: measurement noise, NM, and instrument noise, NI 6.5.1 General <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | 6.5.2 Determination of measurement and instrument noise: application of filters or operators 6.5.3 Determination of measurement and instrument noise: material measures for instrument and measurement noise estimation 6.5.4 Determination of measurement and instrument noise: procedure for the determination of measurement noise <\/td>\n<\/tr>\n | ||||||
| 18<\/td>\n | 6.6 Determination of flatness deviation 6.6.1 General 6.6.2 Material measure for determination of flatness deviation 6.6.3 Procedure for determination of flatness deviation 6.6.4 Improvement of flatness deviation estimation <\/td>\n<\/tr>\n | ||||||
| 19<\/td>\n | 6.6.5 Application of filters and operators 6.6.6 Calibration of flatness deviation 6.7 Determination of the amplification coefficient \u03b1z for the z-axis 6.7.1 General 6.7.2 Determination of the amplification coefficient \u03b1z for the z-axis: material measures <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | 6.7.3 Procedure for determination of amplification coefficient \u03b1z for the instrument z-axis 6.7.4 Type PGR (profile-groove-rectangular): groove, straight (rectangular or trapezoidal) measurement areas <\/td>\n<\/tr>\n | ||||||
| 22<\/td>\n | 6.7.5 Other material measures for the instrument z-axis calibration <\/td>\n<\/tr>\n | ||||||
| 23<\/td>\n | 6.7.6 Procedure for determination of amplification coefficient \u03b1z for the instrument z-axis: range and distance of measurement positions for the calibration of the z-scale of the instrument 6.7.7 Range and distance of measurement position for the calibration of a reduced z-scale of the instrument 6.8 Determination of z-linearity deviation lz 6.8.1 General 6.8.2 Determination of the complete and local z-linearity deviation lz: z-scan range 6.8.3 Determination of z-linearity deviation lz <\/td>\n<\/tr>\n | ||||||
| 24<\/td>\n | 6.8.4 Determination of z-linearity deviation lz: sizes of step heights to be measured <\/td>\n<\/tr>\n | ||||||
| 25<\/td>\n | 6.8.5 Determination of z-linearity deviation lz: positions within the instrument z-range 6.8.6 Determination of z-linearity deviation lz: Non-default methods 6.9 Determination of the amplification coefficients \u03b1x and \u03b1y in x- and y-direction and mapping deviation \u0394x (x,y) and \u0394y (x,y) 6.9.1 General <\/td>\n<\/tr>\n | ||||||
| 26<\/td>\n | 6.9.2 Determination of the amplification coefficient \u03b1x and \u03b1y in x- and y-direction and mapping deviation \u0394x (x,y) and \u0394y (x,y): material measures <\/td>\n<\/tr>\n | ||||||
| 27<\/td>\n | 6.9.3 Determination of the amplification coefficient \u03b1x and \u03b1y in x- and y-direction and mapping deviation \u0394x (x,y) and \u0394y (x,y): assessed measurement volume <\/td>\n<\/tr>\n | ||||||
| 28<\/td>\n | 6.9.4 Procedure for the determination of the amplification coefficient \u03b1x and \u03b1y and mapping deviation \u0394x (x,y) and \u0394y (x,y) of the x- and y-axes 6.10 Perpendicularity of the instrument z-axis with respect to the x-y areal reference 6.11 Topographic spatial resolution WR 6.11.1 General 6.11.2 Material measures for topographic spatial resolution <\/td>\n<\/tr>\n | ||||||
| 29<\/td>\n | 6.11.3 Instrument transfer function (ITF) curve fITF 6.11.4 Lateral period limit DLIM 6.11.5 Use of optical lateral resolution parameters 6.12 Topography fidelity TFI 6.12.1 General 6.12.2 Determination of the topography fidelity TFI using reference metrology <\/td>\n<\/tr>\n | ||||||
| 30<\/td>\n | 6.12.3 Determination of the small-scale fidelity limit TFIL 6.12.4 Slope-dependent effects 7 General information <\/td>\n<\/tr>\n | ||||||
| 31<\/td>\n | Annex A (informative) Relation to the GPS matrix model <\/td>\n<\/tr>\n | ||||||
| 32<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Geometrical product specifications (GPS). Surface texture: Areal – Calibration, adjustment and verification of areal topography measuring instruments<\/b><\/p>\n |