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BSI 21/30440431 DC:2021 Edition

BSI 21/30440431 DC:2021 Edition

$13.70

BS EN IEC 63068-4. Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices – Part 4. Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence

Published By Publication Date Number of Pages
BSI 2021 26
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Status

Definitive
Pages

26
Publication Date

2021-07-09
Standard Number

21/30440431 DC
Title

BS EN IEC 63068-4. Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices – Part 4. Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence
Identical National Standard Of

IEC 63068-4 ED1
Descriptors

Semiconductor devices, Silicon carbide, Defects, Inspection, Evaluation
Publisher

BSI
Committee

EPL/47
ICS Codes 31.080.99 - Other semiconductor devices

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