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BS ISO 21360-5:2023

BS ISO 21360-5:2023

$167.15

Vacuum technology. Standard methods for measuring vacuum-pump performance – Non-evaporable getter (NEG) vacuum pumps

Published By Publication Date Number of Pages
BSI 2023 36
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PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
11 4 Symbols and abbreviated terms
12 5 Test methods
5.1 General
5.1.1 Test gases
5.1.2 Vacuum chamber
5.1.3 Orifice
5.1.4 Vacuum pumping system for rough pumping
13 5.1.5 Vacuum gauges
5.1.6 Temperature
5.1.7 Activation method of NEG
5.1.8 Procedure of sample installation and activation
14 5.2 Throughput method for small NEG samples
5.2.1 Experimental setup
15 5.2.2 Sample
5.2.3 Determination of getter pumping speed, S, and sorption quantity, Cq
17 5.2.4 Determination of sticking probability, α
18 5.2.5 Measurement procedure
5.2.6 Measurement uncertainty
19 5.3 Throughput method with test dome
5.3.1 Experimental setup
21 5.3.2 Sample
5.3.3 Determination of getter pumping speed S and sorption quantity, Cq
5.3.4 Determination of sticking probability, α
5.3.5 Measurement procedure
22 5.3.6 Measurement uncertainty
5.4 Transmission method for NEG coatings
5.4.1 Experimental setup
23 5.4.2 Sample
5.4.3 Determination of average getter pumping speed per unit area, SA, and sorption quantity Cq
25 5.4.4 Determination of sticking probability,α
5.4.5 Measurement procedure
5.4.6 Measurement uncertainty
5.5 Combination of transmission method and throughput method with test dome
27 6 Reporting
6.1 General
6.2 Small size of NEGs with the structure of pill, disk, ring, strip, module and cartridge
6.3 NEG pumps
28 6.4 NEG coatings
29 Annex A (informative) Calculation method of the molecular conductance of the orifice
30 Annex B (informative) Example of diagrams for pumping characteristics of NEG
31 Annex C (informative) Typical value of initial sticking probability α0 of NEG at room temperature
33 Bibliography

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BS ISO 21360-5:2023
$167.15