ISO 5302:2003
$27.30
Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics
Published By | Publication Date | Number of Pages |
ISO | 2003-07 | 20 |
ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.